Latest Approach of Fire Detection at Semiconductor Fab.
• Clean Room of Semiconductor, Flat Panel Factory has high potential risk of Fire due to various equipment and also usage of flammable chemicals which would lead to huge damage to Facility/Equipment and Workers.
• New Sensing Technology is being introduced at Fab. In Japan.
─ Max. 10K times sensing capability to the requirement of regulations.
─ Suction Fan in Sensor to be installed at Sampling Pipe in Clean Air Return
─ Enable to sense the initial smoke from Equipment.
─ Several actual cases reported and it helps quick recovery of Manufacturing Line
─ Some equipment supplier installing this sensor in the Equipment.
• Nohmi continue to pursue the most efficient solution to Clean Room which is also Continue to change.