


	Dr. Spencer Tu/ 涂勝宏博士 Technology Director Taiwan Technology Center Entegris Inc.

Education:
• Ph.D. Materials Science and Engineering, Nation Central University, Taiwan

Experiences:
• Senior R&D Manager, ATMI • Manager, Technical Marketing, BASF

Biography:
Dr. Spencer Sheng-Hung Tu received his B.S./master degree in Chemistry, National Chung Hsing University, Taiwan, and Ph.D. in Materials Science and Engineering, Nation Central University, Taiwan. Dr. Tu is currently the director of Entegris Taiwan Technology Center (TTC) focused on developing advanced process solutions that meet current IC industry requirements. He leads the development of materials and process solutions for existing and future nodes in IC industry. Some of his recent work includes III-V/Ge passivation, cleans compatible to III-V/Ge, SiGe, FEOL/BEOL metals . His vision is to build TTC as the top technology development center to serve Taiwan/Asia customers in advanced process solutions. Prior to joining Entergris, Dr. Tu worked at BASF starting as a chemical formulation development specialist, and then he led RD teams working on products in FPD and IC industries.