SEMI Taiwan Homepage sctaiwan_logo_2015
   
   
Topic:
Sustainability in Semiconductor Facilities (material, exhaust and water recycling)
   
Abstract:
Sustainability is required to save the available global resources and to reduce the climatic impact (Green-house Effect). It consists of several major principles, namely ecology, economy and social. Semiconduc-tor facilities will need to increase their contribution to improved sustainability since they are complex with respect to their construction, utilize a number of rare materials in manufacturing, and consume a substantial amount of electrical power, water, natural gas, chemicals and special gases.

In order to achieve a sound basis for their construction and operation, sustainability commences during the design of such a building and the facilities. Substantial Life Cycle Assessments (LCAs) have to be per-formed to evaluate the impact on the Greenhouse Effect and primary energy consumption of material and product selection, transport and recycling. The analysis is typically based on eco-balanced indicators such as the Environmental Product Declaration of materials and products. Water recycling, exhaust recycling and treatment, energy efficiency and alternative energy supply concepts are possible measures to improve the sustainability of semiconductor facilities and have to be considered during the design phase. Further-more, the defined measures may also result in reduced the utility consumption and operation costs.

Since CAPEX investment plays an important role in overall project economics, this approach may however result in less efficient systems. Green Building certification systems provide a sound good basis but do not consider process supply systems and the process itself which are primarily responsible for utility con-sumptions and fab emissions. Additional procedures such as Energy Management are required during the design phases to integrate the process, process supply systems and HVAC system requirements, to im-prove the overall CO2 footprint and to achieve an optimum between investment and efficiency.

This presentation provides an overview of water and exhaust treatment and recycling concepts, energy efficiency measures and procedures during the design phase which can significantly contribute to improv-ing the sustainability of a semiconductor facility during its construction and operation.