1) Energy saving VOC abatement operation by higher VOC concentration ratio by optimizing zeolite impregnation ratio
2) Easier maintenance & cost effective VOC rotor replacement
3) New application on environment improvement in cleanroom
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| Topic: |
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| VOC Abatement for Semiconductor Plant & IAQ Improvement in Cleanroom | |
| Abstract: | |
| It has passed almost 20years since the world’s first hydrophobic zeolite VOC concentrator was installed by Seibu Giken Co., Ltd. in USA semiconductor plant. Now, VOC concentrator is regarded as default, de-facto standard equipment for VOC abatement system to treat VOC laden exhaust air from semiconductor plant. But, recently there are more and more requests from users for high energy efficiency, high sustainability, and wider application on this technology. Seibu Giken would like to introduce some solutions for such demand with new technologies, such as below mentioned; 1) Energy saving VOC abatement operation by higher VOC concentration ratio by optimizing zeolite impregnation ratio 2) Easier maintenance & cost effective VOC rotor replacement 3) New application on environment improvement in cleanroom |
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