SEMI Taiwan Homepage sctaiwan_logo_2015
   
   
Topic:
Application of IoT in High-Tech Facility
   
Abstract:
It has been over 30 years since FMCS (Facility Monitoring and Control System) was applied to Facility Management in high-tech industries. Especially in the last 10 years, the common use of PLC (Programmable Logic Controller) and SCADA (Supervisory Control and Data Acquisition) system has turned FMCS into completely automated state.

The current facilities operations, which include system power-on, shut-down and recovery, are mostly operated automatically by FMCS. This has been successfully implemented on facility systems from power-on in sequence, then parameter setup, performance adjustment, to finally achieve production needs in operation.However, accidents or events still cannot be prevented because of insufficient self-diagnostic and self-protection capability.

The next main task for FMCS is to develop smart technologies. The short-term target is suggested to help Facility to improve system reliability and resource usage efficiency, also to build the ability of preventive maintenance optimization and visualized environmental monitoring.