Topic:
The CMOS MEMS Platform for Flexible Sensor IP Integration
Abstract:
The multi-sensors integration is very important for the mobile and wearable applications. Based on the more-than-Moore law, the CMOS technologies will be very important for the integration of sensing sub-system. Based on 0.18um/0.35um CMOS, CIC has created the CMOS MEMS platform in the past years. Therefore, to implement the sensor the readout circuit on the same chip is not so difficult. In our studies, the single chip solution with low parasitic between the sensor and readout interface, therefore, it is easy to design with reasonable performance and low power consumption. Motion and posture sensing become increasingly mature, researchers are attempting to expand the scope of sensing applications to physiological and environmental attributes. Furthermore, multi-sensor integration became more important nowadays. The CMOS multi-option MEMS (Mo-MEMS) is considered to serve the trend and the platform could be good to realize the motion sensor, bio-sensor, and environmental sensor at the same time. Responding to the future need for low-power, miniature sensing systems combining motion, physiological, and environmental sensing capabilities, the Chip Implementation Center has developed a complementary metal oxidation semiconductor micro-electromechanical (CMOS MEMS) element process platform able to facilitate the integration of semiconductor circuit design, micro-electromechanical sensor structure, and gold and platinum electrode materials. The platform can enable even more sensing functions to be integrated in a single chip system, which will ensure that the portable biomedical, food safety, and environmental sanitation sensing functions needed by the future "Internet of Things" and intelligent living application can be realized. Sensors will play an indispensable role in future wearable devices and intelligent cities. For more and more intelligent applications, to develop and verify a micro sensing module in a short time is very important. CIC has created the flexible IP evaluation method for rapid integration of micro sensing system. This advance will lend new energy to Taiwan's ICT industry and help make wearable devices and the Internet of Things a reality. This speech will introduce the implementation and verification platform of flexible IP solution for multi-sensing applications.