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Dr. Ru-Gun Liu / 劉如淦 博士
Academician/Deputy Director
OPC Tech. II & Nano Patterning Process Foundation, TSMC
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| Education: |
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• Ph.D. Chemical Engineering, National Central University, Taiwan
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| Experiences: |
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• Department Manager, OPC, TSMC
• Section Manager, ERSO/ITRI
• Associate Researcher, SRRC
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| Biography: |
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• Ru-Gun Liu received his PhD degree in chemical engineering from National Central University, Taiwan, R.O.C., in 1995, and soon joined National Synchrotron Radiation Research Center as an associate researcher. He started to develop the photolithography process and computational lithography in 1998 at Electronics Research & Service Organization (ERSO) of Industrial Technology Research Institute (ITRI). In 2000, he joined TSMC where he is presently working on the developments in nano-patterning process foundation, optimal pattern correction (OPC), resolution enhancement technology (RET), design for manufacturing (DFM), and design-technology co-optimization (DTCO).
• Dr. Liu serves as a member of technical program committees of DAC as well as SPIE. He holds 87 US patents and won the National Industrial Innovation Award in 2013.
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