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Dr. Anthony Yen / 嚴濤南 博士

Director

Nanopatterning Technology Infrastructure Division

TSMC
   
Education:  

• Ph.D. in Electrical Engineering and Computer Science, MIT

• MBA, Sloan School of Management, MIT

   
Experiences:  
• Sr. Vice President, Cymer
• Director, SEMATECH
• Dept. Manager, TSMC
   
Biography:  
Anthony Yen is Director of Nanopatterning Technology Infrastructure Division at Taiwan Semiconductor Manufacturing Company. Among his responsibilities is the development of EUV lithography. He has over seventy publications and holds over thirty U.S. patents on semiconductor technology. He is a fellow of SPIE, a past chair of its Advanced Lithography symposia, and several of its conferences on semiconductor lithography.