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Dr. Anthony Yen / 嚴濤南 博士
Director
Nanopatterning Technology Infrastructure Division
TSMC
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Education: |
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• Ph.D. in Electrical Engineering and Computer Science, MIT
• MBA, Sloan School of Management, MIT
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Experiences: |
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• Sr. Vice President, Cymer
• Director, SEMATECH
• Dept. Manager, TSMC
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Biography: |
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Anthony Yen is Director of Nanopatterning Technology Infrastructure Division at Taiwan Semiconductor Manufacturing Company. Among his responsibilities is the development of EUV lithography. He has over seventy publications and holds over thirty U.S. patents on semiconductor technology. He is a fellow of SPIE, a past chair of its Advanced Lithography symposia, and several of its conferences on semiconductor lithography.
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